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Advanced Technology

Metal Organic Chemical Vapor Deposition (MOCVD) and Atomic Layer Deposition (ALD) Precursors

Tanaka Precious Metals develops and produces high-purity precursors for semiconductors and offers more environmentally-friendly recycling technologies. 

Development and Provision of Precursors

Tanaka Precious Metals has developed various types of chemical vapor deposition (CVD) and atomic layer deposition (ALD) precursors. 

With CVD systems for producing thin semiconductor films and providing various analyzers data for evaluating thin films (field emission scanning electron microscope [FE-SEM], atomic force microscope [AFM], glow-discharge mass spectrometer [GD-MS], etc.), Tanaka Precious Metals Precious Metals offers precursors that are ideal for a variety of different purposes.

Examples of precursor products (ruthenium)

Tanaka Precious Metals develops ruthenium precursors and all other types of precious metal precursor.

Precursor Recycling Technology

Tanaka Precious Metals has developed a recycling technology for the refinement of un-reacted used raw materials, which can be offered at a level of quality equivalent to that of new raw materials. This eliminates the need to purchase precious metals or ligands for the synthesizing of raw materials, making it possible to reduce costs significantly and keep prices stable regardless of fluctuations in the prices of precious metals.

Precursor recycling system *patented

Tanaka Precious Metals' proprietary technique recycles precursors at low cost.

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